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Notice ID: 69d293076504440f8274f4d10077cc49Special Notice

Dopant Selective Deep Reactive Ion Etching of 4H-SiC Wafer

Responses closed . Full description on SAM.gov.

Overview

Response deadline
4:00 PM CDT
Posted
October 13, 2026
Notice type
Special Notice
NAICS
334413: Semiconductor and Related Device Manufacturing
Agency
National Aeronautics and Space Administration

Notice details

Place of performance
Cleveland, Ohio, 44135
PSC
5961: SEMICONDUCTOR DEVICES AND ASSOCIATED HARDWARE
Last updated
Oct 28, 2026
First published
Last updated on SAM.gov

Identifiers

Solicitation number
80NSSC27946811Q
Notice ID
69d293076504440f8274f4d10077cc49

Description

NASA/NSSC has a requirement for Dopant Selective Deep Reactive Ion Etching of 4H-SiC Wafer. See attached SOW for full details of the requirement. 

VENDORS MUST REFERENCE THE NOTICE ID WHEN SUBMITTING A CAPABILITY STATEMENT.

NOTE: Quotes received in response to this notice will NOT be considered and will not be evaluated by
NASA’s Technical End User Team. We are currently only requesting Capability Statements.

Full description on SAM.gov

Award Overview

Contacts

Contracting Officer

Primary Contact

Secondary Contact

Documents

Files (2)

  • SATPC0043009 TAB 04 4 SOW.pdf

    206 KBAdded in Special Notice version 1Posted
    Download
  • SATPC0043009 Tab 07 Capability Statement.pdf

    109 KBAdded in Special Notice version 1Posted
    Download

Lifecycle

  1. 1
    Version 1Special NoticeCurrent

    Dopant Selective Deep Reactive Ion Etching of 4H-SiC Wafer

    Notice 69d293076504440f8274f4d10077cc49 on SAM.gov

Similar Opportunities

Additional Details

Solicitation Number

80NSSC27946811Q

Archive Date

Oct 31, 2026

Office Address

US