UEI: K41YV73EPTH9 • CAGE: 62055

Active

ONTO INNOVATION INC (MA)

Registration and award facts

SAM.gov registration as of Apr 23, 2026

Net obligations recorded since FY2009 under this UEI: $195,003 across 2 awards and orders with positive net obligations.

SAM.gov registration status: Active (registration expiration date Jan 19, 2027)
UEI: K41YV73EPTH9
CAGE code: 62055
Entity structure: Corporate Entity (Not Tax Exempt)
Business start date: Jan 1, 1975
Location: WILMINGTON, MA
Website: ontoinnovation.com

NAICS codes

Product and service codes (PSC)

5961 Other Services/Supplies

SBA certifications

No certification in the SBA profile data.

Federal contract obligations

Net obligations recorded since FY2009: $195,003
Awards and orders with positive net obligations: 2
FY2026 obligations (provisional; DoD awards signed after Jul 18, 2026 are not yet public): $0
Latest action: Oct 13, 2015

Top awarding agencies: Department of Defense

Contract actions that the Department of Defense both funds and awards are withheld at the source for 90 days, so DoD awards signed after Jul 18, 2026 are not yet public.

Latest awards and orders

N0017316P0082 PURCHASE ORDER · Department Of The Navy · latest action Oct 13, 2015
W31P4Q09P0400 PURCHASE ORDER · Department Of The Army · latest action Jul 22, 2009

Other contractors in Massachusetts with primary NAICS 333242

MKS INC. Andover, MA
ULVAC TECHNOLOGIES INC METHUEN, MA
RUDOLPH TECHNOLOGIES INC WILMINGTON, MA
EPIRAY UNITED STATES INC SWAMPSCOTT, MA
MRSI SYSTEMS, LLC TEWKSBURY, MA
AXCELIS TECHNOLOGIES INC BEVERLY, MA

All federal contractors in Massachusetts How these figures are built

Source: SAM.gov entity registration and FPDS contract actions recorded under UEI K41YV73EPTH9. GovChime does not check exclusions.

Key Performance Statistics

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Capabilities

NAICS Codes

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Product/Service Codes

As of Apr 23, 2026. Source: SAM.gov Goods & Services.

5961- Other Services/Supplies

Certifications

Business Types

For Profit OrganizationManufacturer of Goods

Federal Capability Statement

Onto Innovation is a leader in process control, combining global scale with an expanded portfolio of leading edge technologies that include: 3D metrology spanning the chip from nanometer-scale transistors to micron level die-interconnects; macro defect inspection of wafers and packages; metal interconnect composition; factory analytics; and lithography for advanced semiconductor packaging

Capabilities & Services

semiconductor

metrology

inspection

process control

lithography

factory analytics

Contracts

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Contact Info

As of Apr 23, 2026. Source: SAM.gov Points of Contact.

SAM.gov registration for ONTO INNOVATION INC lists a physical address and a separate mailing address, along with 5 verified points of contact. Past Performance contacts are the recommended outreach channel for due-diligence references; Government Business contacts handle procurement-facing correspondence.

Source: SAM.gov entity registration. Contacts displaying numeric or placeholder names have been filtered (defense-in-depth).

Physical Address

16 JONSPIN RD

WILMINGTON, MA, 01887

USA

As of Apr 23, 2026. Source: SAM.gov Entity Registration.

ONTO INNOVATION INC has no active federal suspension or debarment on record in SAM.gov. Current SAM.gov registration expires January 19, 2027.

Source: SAM.gov entity registration (FAR responses, registration status). Always verify active exclusions against the authoritative record on SAM.gov before contract award.

Compliance & Risk Assessment

Source: SAM.gov FAR responses

Suspension/Debarment Status

No active suspension or debarment

Public Display

Entity information is publicly displayed

Disaster Relief Registry

Registered for disaster relief contracting — Nationwide

Bonding Information

No bonding information provided

EDI

Not declared in SAM.gov

Business Structure

Source: SAM.gov

Entity Structure:Corporate Entity (Not Tax Exempt)

Profit Structure:For Profit Organization

Organization:Manufacturer of Goods

CAGE Code:62055

Registration Details

Source: SAM.gov

Date Founded

Jan 1, 1975

Initial Registration

Jun 28, 2001

Last Update

Jan 22, 2026

Registration Activation

Active — Jan 21, 2026

Registration Expiration

Jan 19, 2027

Fiscal Year End

0103

State of Incorporation

Country of Incorporation

USA

Congressional District

Entity Website

ontoinnovation.com